SPP Series
Extra-large pitch polisher
Extra-large pitch polisher for surfaces requiring absolute flatness and mirror-like finishes — optical flats, precision mirrors, optical glass and precision-instrument reference surfaces.
No technical specification table was published for this model.
Key features
- SPP9600: flatness of 30 nm per square metre — proportionally equivalent to a 0.006 mm height difference across the 200 m span of the Tokyo Dome; a specialized granite table minimizes thermal variation for long-term precision, backed by a dedicated surface-plate correction conditioner and an ultra-high-precision gantry facing unit
- SPP3800: the world's only high-precision Oscar-type polishing machine compatible with 10th-generation liquid-crystal photomasks, accommodating plates up to 2400 mm diagonal; the workholding head rotates 105° for easy attachment and removal, and rust-resistant, low-dust construction protects the workpiece from scratches
- SPP3800's granite polishing table minimizes thermal deformation, and slurry supplied from both sides of the workpiece and the centre of the pad keeps supply stable across the full surface
Related models
SPP600S
Polishing machine, equipped with a wide range of software for research and development
User-friendly CMP equipment designed with ease of use and environmental considerations in mind.
SPL Series
Lapping machine — wrap-table machines with a diverse lineup
From space-saving compact wrap tables to large wrap tables — a lapping machine lineup covering electronic materials, metals, optical flats, ceramics, SiC and GaN. Series lineup: SPL15F · SPL24 · SPL32 · SPL36 · SPL120 (requests for sizes beyond this standard lineup require separate consultation).